The AFM in SEM from nano analytik GmbH is not only used for imaging, but can be employed for metrology as well. For this purpose, we are offering a compact AFM system, applicable in any SEM without chamber modification for micro manipulation and metrology scanning. The naB73 scanner is a non-magnetic, closed loop XYZ nanopositioner with 60 μm x 60 μm x 20 μm range of motion (Position noise (nm): x, y = 0.4; z = 0.2) and extremely low out-of-plane motion. It has a high resonant frequency in x, y of 750 Hz and z of 2000 Hz. It is designed for spaceconstrained applications that require high precision positioning. Furthermore, the specially developed 3-axes cantilever head-positioning system is offering motion capabilities in the range of 18 mm in X, Y and 10 mm in Z with a closed loop accuracy of < 5 nm and a closed loop repeatability of +/- 25 nm.nano analytik GmbH employs self-transduced and self-sensed (2DEG read-out) cantilevers in SEM, which meet the following criteria: (I) low spring constant (low longitudinal stiffness), (II) high resonance frequency, (III) high quality factor of the cantilever, (IV) high lateral spring constant (high transversal stiffness), arranged for electronic read-out actuation and conductive tip ensures that no electric charging can occur. .